Faculty

Institution

Unit

Venue

James R. Engstrom

Professor

Cornell University

Affiliations

College of Engineering

School of Chemical and Biomolecular Engineering

College of Arts and Sciences

Department of Chemistry and Chemical Biology

James R. Engstrom is currently serving as a College Of Engineering Professor at Cornell University.

Honors

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Experiences

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Education

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James R. Engstrom

Cornell University

Professor

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surface science chemistry interface science applied physics materials science thin films interface (matter) surface chemistry crystal growth physical chemistry material chemistry surface reactivity thin film processing chemical vapor deposition chemical engineering chemical kinetics material research transition metal chemistry characterization (materials science) thin film process technology chemisorption surface analysis nanotechnology chemical physics surface characterization electronic materials chemical deposition epitaxial growth hydrogen chemical sciences surface nanotechnology adsorption energy chemistry reaction probability coordination chemistry crystal engineering solid-state electronics molecular crystals organic semiconductors atomic spectroscopy structural chemistry plasma chemistry growth rate atomic layer deposition heterogeneous catalysis vacuum device molecular beam epitaxy surface functionalization semiconductor device fabrication oxidation resistance altmetric attention score social media presence atomic hydrogen interface chemistry interfacial studies organic electronics donut icon incident kinetic energy pentacene thin films carbon monoxide atomic oxygen colloidal nanocrystals nanocrystalline materials organometallic catalysis infrared spectroscopy surface nanoengineering material simulation molecular kinetics molecular solids nucleation molecular self-assembly adsorption reaction reactive surface pentacene films catalytic selectivity incident angle energy systems sustainable energy systems advanced materials material innovation

Notable Scholarly Works

Notable Federal Grants

Collaborators

Nonpyrophoric Alternative to Trimethylaluminum for the Atomic Layer Deposition of Al2o3. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films (2025)

Jay V. SwarupHeng-Ray ChuangJames T. JensenJeffrey GaoAmy L. YouJames R. Engstrom

thin filmsmaterials sciencechemical vapor depositionx-ray reflectivitymaterial chemistrysurface sciencematerial researchquartz crystal microbalancechemical depositionadvanced materialscrystal growthchemistrythin film processingthin film process technologyapplied physics

Effect of Co-Reactants on Interfacial Oxidation in Atomic Layer Deposition of Oxides on Metal Surfaces. ACS Applied Materials & Interfaces (2024)

Jay V. SwarupHeng-Ray ChuangAmy L. YouJames R. Engstrom

thin filmsmaterials sciencemetal surfacesinterface sciencesurface sciencechemical depositioncrystal growththin film processingatomic layer depositionthin film process technologyinterfacial oxidationapplied physicsmetals

Ieee Wmed 2023 Keynote Address. (2023)

Naga ChandrasekaranSenior VpAkshay SinghKurtis CantleyJames EngstromTajana RosingMadhavan Swaminathan

technologyscalabilitymemory architecturesmicroarchitecturecomputer engineeringin-storage computingcomputer architecturenew applicationshigh performance computer architecturestorage hierarchycomputer scienceieee wmed 2023

Nucleation, Growth, and Stability of Wse2 Thin Films Deposited on Hopg Examined Using in Situ, Real-Time Synchrotron X-Ray Radiation. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films (2021)

Hugh J. BullenSuresh VishwanathRambert K. NahmH. Grace XingJames R. Engstrom

thin filmsmaterials sciencechemical vapor depositionnanoscale sciencematerial chemistrysurface scienceelectronic materialswse2 thin filmscondensed matterlayered materialscrystal growthchemistryapplied physicswse2 growthcharacterization (materials science)

Area-Selective Atomic Layer Deposition Enabled by Competitive Adsorption. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films (2020)

Taewon SuhYan YangHae Won SohnRobert A. DiStasioJames R. Engstrom

thin filmsmaterials sciencecompetitive adsorptionmaterial chemistrythin film processingsurface reactivitymetalsinterface scienceinterface (matter)nanotechnologyzro2 thin filmschemical depositionchemistrysurface chemistrychemical vapor depositionsurface sciencecrystal growthatomic layer depositionnanomaterials

A Vacuum Ultraviolet-Enhanced Oxidation Mechanism for Pd: Near-Surface Oxidation for Atomic Layer Etching. ACS Applied Materials & Interfaces (2020)

Brennan M. CoffeyHimamshu C. NallanJames R. EngstromJohn G. Ekerdt

thin filmsmaterials sciencesurface chemistryoxidation resistancepd oxidationinterface sciencesurface sciencematerial chemistryphotochemistrygas phasevacuum ultravioletchemistrysurface analysistransition metal chemistry

Competitive Adsorption as a Route to Area-Selective Deposition. ACS Applied Materials & Interfaces (2020)

Taewon SuhYan YangPengyuan ZhaoKa Un LaoHsin-Yu KoJonathan WongRobert A. DiStasioJames R. Engstrom

thin filmsmaterials sciencechemical vapor depositioncompetitive adsorptionzro2 thin filmsinterface sciencesurface sciencematerial chemistryoxide electronicsinterface (matter)chemical depositioncrystal growththin film processingchemistrythin film process technologyarea-selective deposition

Vacuum Ultraviolet-Enhanced Oxidation—a Route to the Atomic Layer Etching of Palladium Metal. Chemistry of Materials (2020)

Brennan M. CoffeyHimamshu C. NallanJames R. EngstromChon Hei LamJohn G. Ekerdt

thin filmsmaterials scienceinterface sciencesurface sciencematerial chemistrychemical engineeringplasma chemistryvacuum devicepd filmvacuum ultravioletchemistrysurface analysispalladium metalcharacterization (materials science)energy chemistry

Design and Characterization of a Microreactor for Spatially Confined Atomic Layer Deposition and in Situ Uhv Surface Analysis. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films (2017)

Jiun-Ruey ChenWenyu ZhangRambert K. NahmMichael A. DiFeoJames R. Engstrom

thin filmsmaterials sciencethin film processingmicrofabricationreaction zoneinterface sciencematerial researchchemical engineeringapplied physicscharacterization (materials science)vacuum devicechemical depositionprecision engineeringmicrofluidicsmicro technologychemical vapor depositionsubstrate surfacesurface scienceultrathin filmscrystal growth

Faster is Smoother and so is Lower Temperature: The Curious Case of Thin Film Growth of Tetracene on Sio 2. The Journal of Physical Chemistry C (2017)

R. K. NahmH. J. BullenT. SuhJ. R. Engstrom

thin filmsmaterials scienceepitaxial growthinterface sciencesurface sciencematerial researchmaterials engineeringlbl growthinterface (matter)crystal growththin film processingthin film process technologyapplied physicsgrowth rate

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James R. Engstrom

Professor

Cornell University

Affiliations

College of Engineering

School of Chemical and Biomolecular Engineering

College of Arts and Sciences

Department of Chemistry and Chemical Biology

James R. Engstrom is currently serving as a College Of Engineering Professor at Cornell University.

Honors

Create free account to unlock more features

Experiences

Create free account to unlock more features

Education

Create free account to unlock more features

James R. Engstrom

Cornell University

Professor

You can click a keyword to filter the displayed items

Notable Scholarly Works

Notable Federal Grants

Collaborators

Nonpyrophoric Alternative to Trimethylaluminum for the Atomic Layer Deposition of Al2o3. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films (2025)

Jay V. SwarupHeng-Ray ChuangJames T. JensenJeffrey GaoAmy L. YouJames R. Engstrom

Effect of Co-Reactants on Interfacial Oxidation in Atomic Layer Deposition of Oxides on Metal Surfaces. ACS Applied Materials & Interfaces (2024)

Jay V. SwarupHeng-Ray ChuangAmy L. YouJames R. Engstrom

Ieee Wmed 2023 Keynote Address. (2023)

Naga ChandrasekaranSenior VpAkshay SinghKurtis CantleyJames EngstromTajana RosingMadhavan Swaminathan

Hugh J. BullenSuresh VishwanathRambert K. NahmH. Grace XingJames R. Engstrom

Area-Selective Atomic Layer Deposition Enabled by Competitive Adsorption. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films (2020)

Taewon SuhYan YangHae Won SohnRobert A. DiStasioJames R. Engstrom

A Vacuum Ultraviolet-Enhanced Oxidation Mechanism for Pd: Near-Surface Oxidation for Atomic Layer Etching. ACS Applied Materials & Interfaces (2020)

Brennan M. CoffeyHimamshu C. NallanJames R. EngstromJohn G. Ekerdt

Competitive Adsorption as a Route to Area-Selective Deposition. ACS Applied Materials & Interfaces (2020)

Taewon SuhYan YangPengyuan ZhaoKa Un LaoHsin-Yu KoJonathan WongRobert A. DiStasioJames R. Engstrom

Vacuum Ultraviolet-Enhanced Oxidation—a Route to the Atomic Layer Etching of Palladium Metal. Chemistry of Materials (2020)

Brennan M. CoffeyHimamshu C. NallanJames R. EngstromChon Hei LamJohn G. Ekerdt

Jiun-Ruey ChenWenyu ZhangRambert K. NahmMichael A. DiFeoJames R. Engstrom

Faster is Smoother and so is Lower Temperature: The Curious Case of Thin Film Growth of Tetracene on Sio 2. The Journal of Physical Chemistry C (2017)

R. K. NahmH. J. BullenT. SuhJ. R. Engstrom

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