Faculty

Institution

Unit

Venue

Dashen Shen

Professor Emeritus

University of Alabama in Huntsville

Affiliations

College of Engineering

Electrical & Computer Engineering

Dashen Shen is currently serving as a College Of Engineering Professor Emeritus at University of Alabama In Huntsville.

Honors

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Experiences

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Education

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Dashen Shen

University of Alabama in Huntsville

Professor Emeritus

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materials science applied physics electrical engineering thin films engineering optoelectronics microelectronics electronic materials electronics materials engineering solid-state electronics nanotechnology surface science semiconductor technology semiconductor nanostructures atomic layer deposition power electronics semiconductor devices material chemistry graphene nanomaterials layered materials semiconductor materials surface characterization additive manufacturing nuclear science surface processing oxide electronics semiconductor device fabrication total-dose radiation response metals condensed matter material research surface modification aluminum gallium nitride power semiconductor devices surface chemistry surface engineering surface analysis nuclear engineering radiation effects rare metal vacuum device thin film processing electrical characterization interface science mechanical science composite science thermal engineering nuclear materials particle beam multilayer heterostructures micro-electromechanical systems micro technology applied chemistry organic electronics surface nanotechnology printed electronics plasma processing plasma etching radiation biology ion beam instrumentation radiation exposure aln films property transformation silicon-on-insulator technology direct growth breakdown voltage novel analytical model pulse laser deposition gadolinium oxide film doping mechanism reversible n-type doping electron beam evaporation hfsio film si substrate silicon on insulator advanced dielectric flat panel displays

Notable Scholarly Works

Notable Federal Grants

Collaborators

Morphology Improvement of Sic Trench by Inductively Coupled Plasma Etching Using Ni/Al 2 O 3 Bilayer Mask. Materials Science in Semiconductor Processing (2017)

Jingjie LiXinhong ChengQian WangLi ZhengLingyan ShenXinchang LiDongliang ZhangHongyue ZhuDaShen ShenYuehui Yu

materials engineeringsolid-state electronicsplasma etchingsic trenchengineeringmorphology improvementmaterials sciencesurface processing

Direct Growth of Sb 2 Te 3 on Graphene by Atomic Layer Deposition. RSC Advances (2015)

Li ZhengXinhong ChengDuo CaoQian WangZhongjian WangChao XiaLingyan ShenYuehui YuDashen Shen

materials engineeringcomposite scienceatomic layer depositionadvanced materialscondensed mattermetalssemiconductor nanostructuresnanotechnologydirect growthmechanical engineeringmaterial chemistrysemiconductor technologyelectronic materialsgraphenesemiconductor materialsapplied physicsthin filmsmaterials science

Effects of Rapid Thermal Annealing on the Properties of Aln Films Deposited by Peald on Algan/Gan Heterostructures. RSC Advances (2015)

Duo CaoXinhong ChengYa-Hong XieLi ZhengZhongjian WangXinke YuJia WangDashen ShenYuehui Yu

solid-state electronicssemiconductor nanostructuressemiconductor technologyelectronic materialsengineeringoptoelectronicssemiconductor materialsthin filmssemiconductorsaln filmsmetalssurface sciencematerial chemistrymultilayer heterostructuresaluminum gallium nitridetechnologyelectronicsmicroelectronicsmaterials science

Reversible N-Type Doping of Graphene by H 2 O-Based Atomic-Layer Deposition and Its Doping Mechanism. The Journal of Physical Chemistry C (2015)

Li ZhengXinhong ChengZhongjian WangChao XiaDuo CaoLingyan ShenQian WangYuehui YuDashen Shen

doping mechanismmaterials engineeringorganic electronicstechnologynanotechnologyphysical chemistryoptoelectronicsmaterial chemistryelectronic materialssemiconductor technologygrapheneapplied chemistrysemiconductor materialselectronicsapplied physicsoxide electronicsmaterials sciencereversible n-type doping

A Novel Partial Soi Edmos ( 800V) With a Buried N-Type Layer on the Double Step Buried Oxide. Superlattices and Microstructures (2014)

Qian WangXinhong ChengZhongjian WangChao XiaLingyan ShenLi ZhengDuo CaoYuehui YuDaShen Shen

mechanical engineeringburied n-type layerelectrical engineeringoxide electronicscondensed matter physicsmaterials sciencedouble step

Effects of Rapid Thermal Annealing on the Properties of Hfo2/La2O3 Nanolaminate Films Deposited by Plasma Enhanced Atomic Layer Deposition. Journal of Vacuum Science & Technology A Vacuum Surfaces and Films (2014)

Duo CaoXinhong ChengLi ZhengZhongjian WangDawei XuChao XiaLingyan ShenQian WangYuehui YuDaShen Shen

nanomaterialsthermal engineeringatomic layer depositionadvanced materialssurface sciencesurface modificationnanotechnologylayered materialsapplied physicsthin filmsmaterials science

Improvement of Al 2 O 3 Films on Graphene Grown by Atomic Layer Deposition With Pre-H 2 O Treatment. ACS Applied Materials & Interfaces (2014)

Li ZhengXinhong ChengDuo CaoGang WangZhongjian WangDawei XuChao XiaLingyan ShenYuehui YuDashen Shen

materials engineeringadditive manufacturingatomic layer depositionadvanced materialssurface sciencetechnologyengineeringmaterial researchinterface sciencelayered materialsmaterial chemistrysurface modificationelectronic materialsgraphenethin filmsmaterials science

Improvement of Soi Trench Ldmos Performance With Double Vertical Metal Field Plate. IEEE Transactions on Electron Devices (2014)

None Chao XiaNone Xinhong ChengNone Zhongjian WangNone Dawei XuNone Duo CaoNone Li ZhengNone Lingyang ShenNone Yuehui YuNone Dashen Shen

engineeringoptoelectronicselectrical engineeringelectronicsapplied physics

Low-Temperature Plasma-Enhanced Atomic Layer Deposition of Hfo2/Al2O3 Nanolaminate Structure on Si. Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena (2014)

Duo CaoXinhong ChengLi ZhengDawei XuZhongjian WangChao XiaLingyan ShenYuehui YuDaShen Shen

nanomaterialsmaterials engineeringsolid-state electronicssurface sciencesemiconductor nanostructuresnanotechnologyelectronic materialssurface chemistryapplied physicsmicroelectronicsmaterials science

Property Transformation of Graphene With Al 2 O 3 Films Deposited Directly by Atomic Layer Deposition. Applied Physics Letters (2014)

Li ZhengXinhong ChengDuo CaoZhongjian WangChao XiaYuehui YuDashen Shen

materials engineeringatomic layer depositionsemiconductor nanostructuresnanotechnologylayered materialsmechanical engineeringmechanical sciencenanoengineeringelectronic materialssemiconductor technologyproperty transformationgraphenesemiconductor materialsapplied physicsthin filmsmaterials sciencesemiconductor device fabrication

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Dashen Shen

Professor Emeritus

University of Alabama in Huntsville

Affiliations

College of Engineering

Electrical & Computer Engineering

Dashen Shen is currently serving as a College Of Engineering Professor Emeritus at University of Alabama In Huntsville.

Honors

Create free account to unlock more features

Experiences

Create free account to unlock more features

Education

Create free account to unlock more features

Dashen Shen

University of Alabama in Huntsville

Professor Emeritus

You can click a keyword to filter the displayed items

Notable Scholarly Works

Notable Federal Grants

Collaborators

Morphology Improvement of Sic Trench by Inductively Coupled Plasma Etching Using Ni/Al 2 O 3 Bilayer Mask. Materials Science in Semiconductor Processing (2017)

Jingjie LiXinhong ChengQian WangLi ZhengLingyan ShenXinchang LiDongliang ZhangHongyue ZhuDaShen ShenYuehui Yu

materials engineeringsolid-state electronicsplasma etchingsic trenchengineeringmorphology improvementmaterials sciencesurface processing

Direct Growth of Sb 2 Te 3 on Graphene by Atomic Layer Deposition. RSC Advances (2015)

Li ZhengXinhong ChengDuo CaoQian WangZhongjian WangChao XiaLingyan ShenYuehui YuDashen Shen

Effects of Rapid Thermal Annealing on the Properties of Aln Films Deposited by Peald on Algan/Gan Heterostructures. RSC Advances (2015)

Duo CaoXinhong ChengYa-Hong XieLi ZhengZhongjian WangXinke YuJia WangDashen ShenYuehui Yu

Reversible N-Type Doping of Graphene by H 2 O-Based Atomic-Layer Deposition and Its Doping Mechanism. The Journal of Physical Chemistry C (2015)

Li ZhengXinhong ChengZhongjian WangChao XiaDuo CaoLingyan ShenQian WangYuehui YuDashen Shen

A Novel Partial Soi Edmos ( 800V) With a Buried N-Type Layer on the Double Step Buried Oxide. Superlattices and Microstructures (2014)

Qian WangXinhong ChengZhongjian WangChao XiaLingyan ShenLi ZhengDuo CaoYuehui YuDaShen Shen

mechanical engineeringburied n-type layerelectrical engineeringoxide electronicscondensed matter physicsmaterials sciencedouble step

Duo CaoXinhong ChengLi ZhengZhongjian WangDawei XuChao XiaLingyan ShenQian WangYuehui YuDaShen Shen

nanomaterialsthermal engineeringatomic layer depositionadvanced materialssurface sciencesurface modificationnanotechnologylayered materialsapplied physicsthin filmsmaterials science

Improvement of Al 2 O 3 Films on Graphene Grown by Atomic Layer Deposition With Pre-H 2 O Treatment. ACS Applied Materials & Interfaces (2014)

Li ZhengXinhong ChengDuo CaoGang WangZhongjian WangDawei XuChao XiaLingyan ShenYuehui YuDashen Shen

Improvement of Soi Trench Ldmos Performance With Double Vertical Metal Field Plate. IEEE Transactions on Electron Devices (2014)

None Chao XiaNone Xinhong ChengNone Zhongjian WangNone Dawei XuNone Duo CaoNone Li ZhengNone Lingyang ShenNone Yuehui YuNone Dashen Shen

engineeringoptoelectronicselectrical engineeringelectronicsapplied physics

Duo CaoXinhong ChengLi ZhengDawei XuZhongjian WangChao XiaLingyan ShenYuehui YuDaShen Shen

nanomaterialsmaterials engineeringsolid-state electronicssurface sciencesemiconductor nanostructuresnanotechnologyelectronic materialssurface chemistryapplied physicsmicroelectronicsmaterials science

Property Transformation of Graphene With Al 2 O 3 Films Deposited Directly by Atomic Layer Deposition. Applied Physics Letters (2014)

Li ZhengXinhong ChengDuo CaoZhongjian WangChao XiaYuehui YuDashen Shen

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