Faculty

Institution

Unit

Venue

Xiuling Li

Donald Biggar Willett Professor in Engineering

UIUC

Affiliations

The Grainger College of Engineering

Department of Electrical and Computer Engineering

Electrical & Computer Engineering

Xiuling Li is currently serving as an Electrical And Computer Engineering Donald Biggar Willett Professor in Engineering at Uiuc.

Honors

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Experiences

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Education

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Xiuling Li

UIUC

Donald Biggar Willett Professor in Engineering

You can click a keyword to filter the displayed items

applied physics electronic materials solid-state electronics semiconductors materials science electrical engineering electronics nanotechnology optoelectronics microelectronics nanowires advanced functional materials nanoelectronics microfabrication compound semiconductors semiconductor technology semiconductor nanostructures lightwave technology semiconductor devices luminescence semiconductor device fabrication crystal growth optical materials chemical engineering material research interface science precision engineering aluminum gallium nitride wide-bandgap semiconductors categoryiii-v semiconductor epitaxial growth nanolithography method photonic devices light science vlsi technology advanced energy material semiconductor materials nanoscale science photoluminescence gallium oxide nano energy metal-assisted chemical etching plasma etching solid-state lighting nanostructure synthesis electronic engineering silicon on insulator material chemistry guided-wave optic new lighting technology fabrication techniques advanced packaging (semiconductors) radio frequency nanoparticle research graphene nanoribbons rf semiconductor quantum photonics porous silicon white oled cluster science extreme miniaturization luminescence property origami metamaterials semiconductor nanowires planar gaas nanowires silicon nanowires growth rate chemical etching planar nanowires formation process semiconductor nanotubes soft lithography nanowire growth conversion efficiency planar spiral inductors heterogeneous integration chemical vapor deposition nanomaterials

Video Presentations

Notable Scholarly Works

Notable Federal Grants

Collaborators

Comprehensive Study of β-Ga2O3 Epitaxial Growth Using a Variable Closed-Coupled Showerhead Mocvd Reactor. Applied Physics Reviews (2025)

Aadil WaseemGavin M. LathamClifford McAleeseSalwan OmarIndraneel SanyalDaniel M. DrydenAndrew PakesXiuling Li

thin filmsmaterials scienceepitaxial growthβ-ga2o3 epitaxial growthadvanced functional materialssurface sciencematerial researchelectronic materialsmaterials engineeringoxide electronicssitu reflectance monitoringsolid-state electronicscrystal growth technologycrystal growthsemiconductorsgallium oxideapplied physicscharacterization (materials science)

High‐Frequency Inductors by Co‐Design Optimization of Self‐Rolled‐Up Membrane Technology. Advanced Electronic Materials (2025)

Kristen Minh‐Thu NguyenZhendong YangAllen Tsingyuan WangScott Ambros WickerXiuling Li

interconnect (integrated circuits)high‐frequency inductorsradio frequencyhigh-frequency devicesintegrated circuitsmicrowave technologyelectromagnetic compatibilityelectrical engineeringmicroelectronicscrosstalk capacitance

Pronounced Visible Luminescence in Gan by High-Temperature Anion Implantation. Applied Physics Letters (2025)

Aadil WaseemXihang WuClarence ChanYujie LiuZhongjie RenZhengwei YeEmmanouil KioupakisZetian MiXiuling Li

materials sciencecategoryiii-v semiconductorquantum heterostructuresluminescenceoptoelectronicselectronic materialsmaterial researchsolid-state electronicssemiconductorswide-bandgap semiconductorsapplied physicsaluminum gallium nitridecharacterization (materials science)advanced energy materialion implantationenergy conversionelectronicscompound semiconductorsgan power devicepronounced visible luminescenceelectrical engineering

Quantum Sensing With Spin Defects Beyond Diamond. ACS Nano (2025)

Henry RobertsHamza AbudayyehXiaoqin LiXiuling Li

physicsmaterials scienceadvanced functional materialselectronic materialsspin phenomenonquantum sensing protocolsquantum sciencehexagonal boron nitridespintronicssolid-state electronicsspintronic materialsquantum sensingspin defectsapplied physicsquantum materials

Aln Self-Rolled-Up Microtube Resonators With Multimode Resonances for On-Chip Optomechanical Sensing. (2024)

Yuncong LiuApratim KhandelwalZhongjie RenAllen WangXiuling LiPhilip X.-L. Feng

physicsmicro-electromechanical systemsmicromachinesmultimode resonancesoptical propertiesoptical materialsoptomechanical systemsmicro-optical componentphotonicslightwave technologyaluminum nitridealn s-rum resonatorsapplied physicsoptoelectronicsprecision engineeringmicrofabrication

Aluminum Nitride Ring Resonator-Coupled Spin Defects in Hexagonal Boron Nitride for Integrated Quantum Photonics. (2024)

Henry C. RobertsAadil WaseemScott A. WickerHamza AbudayyehDong Seob KimZhida LiuSteven RandolphXiaoqin LiXiuling Li

physicsintegrated quantum photonicselectronic materialsquantum sciencehexagonal boron nitrideelectronicssemiconductorsquantum engineeringlightwave technologywaveguide-coupled emissionquantum photonic deviceapplied physicsquantum materialsoptoelectronicsquantum devices

Demystifying Metal-Assisted Chemical Etching of Gan and Related Heterojunctions. Applied Physics Reviews (2024)

Clarence Y. ChanJan Paul MenzelYicong DongZhuoran LongAadil WaseemXihang WuYixin XiaoJinqiao XieEdmond K. C. ChowShaloo RakhejaVictor S. BatistaZetian MiXiuling Li

categoryiii-v semiconductoranisotropic etchingplasma etchingquantum heterostructuresoptoelectronicselectrochemistryelectronic materialschemical engineeringphoto-enhanced macetch processsolid-state electronicssemiconductorswide-bandgap semiconductorsmicroelectronicsapplied physicsaluminum gallium nitrideplasma chemistryadvanced energy materialelectrochemical engineeringelectronicsanode designgan power deviceelectrical engineering

Metal-Assisted Chemical Etching Beyond Si: Applications to III–V Compounds and Wide-Bandgap Semiconductors. Nanoscale (2024)

Sami ZnatiJuwon WharwoodKyle G. TezanosXiuling LiParsian K. Mohseni

materials scienceelectronic materialschemical engineeringcategoryiii-v semiconductormetal-assisted chemical etchingsolid-state electronicssemiconductor device fabricationelectronicsbeyond-si macetch mechanismssemiconductorswide-bandgap semiconductorsapplied physicsoptoelectronicsaluminum gallium nitridecompound semiconductors

Plasma‐Damage Free Efficiency Scaling of Micro‐Leds by Metal‐Assisted Chemical Etching. Advanced Optical Materials (2024)

Clarence Y. ChanHenry C. RobertsYixin XiaoPaul J. FroeterDane J. SieversZetian MiXiuling Li

materials sciencechemical etchinglightingµled devicesoptical materialssolid-state lightingnew lighting technologyplasma etchingadvanced display technologyelectrical engineeringmicroelectronicsefficiency cliffluminescenceapplied physicsoptoelectronicslight sciencemicrofabrication

S-Rum Inductors: 30-Fold Enhancement of Inductance by Controlled Electroplating Post Rolling. (2024)

Zhendong YangApratim KhandelwalAllen WangKristen NguyenScott WickerYang Victoria ShaoXiuling Li

materials scienceinductance boosts-rum inductorselectronic packagingelectrical engineeringmicroelectronicspower electronicshigh inductancesmicrofabrication

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Xiuling Li

Donald Biggar Willett Professor in Engineering

UIUC

Affiliations

The Grainger College of Engineering

Department of Electrical and Computer Engineering

Electrical & Computer Engineering

Xiuling Li is currently serving as an Electrical And Computer Engineering Donald Biggar Willett Professor in Engineering at Uiuc.

Honors

Create free account to unlock more features

Experiences

Create free account to unlock more features

Education

Create free account to unlock more features

Xiuling Li

UIUC

Donald Biggar Willett Professor in Engineering

You can click a keyword to filter the displayed items

Video Presentations

Notable Scholarly Works

Notable Federal Grants

Collaborators

Comprehensive Study of β-Ga2O3 Epitaxial Growth Using a Variable Closed-Coupled Showerhead Mocvd Reactor. Applied Physics Reviews (2025)

Aadil WaseemGavin M. LathamClifford McAleeseSalwan OmarIndraneel SanyalDaniel M. DrydenAndrew PakesXiuling Li

High‐Frequency Inductors by Co‐Design Optimization of Self‐Rolled‐Up Membrane Technology. Advanced Electronic Materials (2025)

Kristen Minh‐Thu NguyenZhendong YangAllen Tsingyuan WangScott Ambros WickerXiuling Li

Pronounced Visible Luminescence in Gan by High-Temperature Anion Implantation. Applied Physics Letters (2025)

Aadil WaseemXihang WuClarence ChanYujie LiuZhongjie RenZhengwei YeEmmanouil KioupakisZetian MiXiuling Li

Quantum Sensing With Spin Defects Beyond Diamond. ACS Nano (2025)

Henry RobertsHamza AbudayyehXiaoqin LiXiuling Li

Aln Self-Rolled-Up Microtube Resonators With Multimode Resonances for On-Chip Optomechanical Sensing. (2024)

Yuncong LiuApratim KhandelwalZhongjie RenAllen WangXiuling LiPhilip X.-L. Feng

Aluminum Nitride Ring Resonator-Coupled Spin Defects in Hexagonal Boron Nitride for Integrated Quantum Photonics. (2024)

Henry C. RobertsAadil WaseemScott A. WickerHamza AbudayyehDong Seob KimZhida LiuSteven RandolphXiaoqin LiXiuling Li

Demystifying Metal-Assisted Chemical Etching of Gan and Related Heterojunctions. Applied Physics Reviews (2024)

Clarence Y. ChanJan Paul MenzelYicong DongZhuoran LongAadil WaseemXihang WuYixin XiaoJinqiao XieEdmond K. C. ChowShaloo RakhejaVictor S. BatistaZetian MiXiuling Li

Metal-Assisted Chemical Etching Beyond Si: Applications to III–V Compounds and Wide-Bandgap Semiconductors. Nanoscale (2024)

Sami ZnatiJuwon WharwoodKyle G. TezanosXiuling LiParsian K. Mohseni

Plasma‐Damage Free Efficiency Scaling of Micro‐Leds by Metal‐Assisted Chemical Etching. Advanced Optical Materials (2024)

Clarence Y. ChanHenry C. RobertsYixin XiaoPaul J. FroeterDane J. SieversZetian MiXiuling Li

S-Rum Inductors: 30-Fold Enhancement of Inductance by Controlled Electroplating Post Rolling. (2024)

Zhendong YangApratim KhandelwalAllen WangKristen NguyenScott WickerYang Victoria ShaoXiuling Li

materials scienceinductance boosts-rum inductorselectronic packagingelectrical engineeringmicroelectronicspower electronicshigh inductancesmicrofabrication

1
2
3
4
5
28
10 / page